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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo




[PDF.st56] Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

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 | #1044694 in Books |  Stephen M Rossnagel |  1991-01-14 | Ingredients: Example Ingredients | Original language:English | PDF # 1 |  9.02 x1.19 x5.98l,1.80 | File type: PDF | 546 pages

 | Handbook Of Plasma Processing Technology

|| |"The text provides and excellent reference for plasma processing." - SAMPE Journal

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.



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