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Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)

Harry J. Levinson




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 | #2615805 in Books |  SPIE Publications |  2005-02-01 | Original language:English | PDF # 1 |  1.19 x7.26 x10.34l,2.35 | File type: PDF | 438 pages

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||11 of 13 people found the following review helpful.| Review of "Principles of Lithography," 2nd edition by Harry J. Levinson.|By Edward H. Sebesta|This is an excellent book for engineers, whether in photolithography or not, to acquire an overview and understanding of modern deep sub-micron photolithography and the challenges microlithographers face. It is well written and easy to read. Levinson takes you through the entire proc|From the Author|This book is intended as an introduction to the science of microlithography for those new to the subject, and it covers advanced topics useful to experienced lithographers who seek information outside their own areas of expertise. Numerous refere

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for peo...

You can specify the type of files you want, for your gadget.Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)   |  Harry J. Levinson.Not only was the story interesting, engaging and relatable, it also teaches lessons.

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